MEMS-in-TEM for Nano Tribology

Tribology and Nano-Tribology Problems in Data Storage on Hard Disks

In current “state of the art” disk drives, the flying height between slider and disk is on the order of 10 nm. The flying height will need to be reduced to approximately 3 nm to meet future storage density goals. At a spacing of 3 nm, severe tribological problems will occur with respect to friction, wear and lubrication of the head/disk interface. In this paper, tribology and nano-tribology pro...

Atomic-Scale Issues in Tribology: Interfacial Junctions and Nano-elastohydrodynamics†

Advances in computer-basedmodeling and simulationmethodologies and capabilities, coupled with the emergenceanddevelopment of high-resolution experimental techniques, allow investigations of tribological phenomenawith unprecedented atomic-scale spatial and temporal resolution. We focus here onmolecular dynamics simulations of formationandproperties of interfacial junctionsandonnano-elastohydrody...

Mems Flow Sensors for Nano-fluidic Applications

This paper presents micromachined thermal sensors for measuring liquid flow rates in the nanoliter-per-minute range. The sensors use a boron-doped polysilicon thinfilm heater that is embedded in the silicon nitride wall of a microchannel. The boron doping is chosen to increase the heater’s temperature coefficient of resistance within tolerable noise limits, and the microchannel is suspended fro...

MEMS ̄ow sensors for nano- ̄uidic applications

This paper presents micromachined thermal sensors for measuring liquid ̄ow rates in the nanoliter-per-minute range. The sensors use a boron-doped polysilicon thin-®lm heater that is embedded in the silicon nitride wall of a microchannel. The boron doping is chosen to increase the heater's temperature coef®cient of resistance within tolerable noise limits, and the microchannel is suspended from ...

In-Situ Mechanical Testing of Nano-Component in TEM